https://ogma.newcastle.edu.au/vital/access/ /manager/Index en-au 5 Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:21381 Sat 24 Mar 2018 08:04:58 AEDT ]]> A high-bandwidth MEMS nanopositioner for on-chip AFM: design, characterization, and control https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:26753 Sat 24 Mar 2018 07:24:44 AEDT ]]>